Abstract: Slitless spectral sky survey is the key direction of international astronomical research. Compared with ground-based sky survey, space sky survey can obtain more spectral information in ultraviolet and infrared bands, and its development is restricted by dispersive elements. A series of researches have been carried out on ultraviolet transmission blazed grating, the core dispersive element of ultraviolet band. The pattern is generated by holographic interference lithography, and the pattern is transferred to the substrate by ion beam vertical etching to form a grating mask. By using the grating mask to block the inclined ion beam, different parts of the groove bottom are bombarded with different ion beam fluxes, so as to obtain asymmetric groove structure. The main composition of the deposit and its influence on the groove shape and blaze angle in the inclined ion beam etching are analyzed. Under the condition of removing the influence of sediment, the ultraviolet transmission blazed gratings with linear density of 333lines/mm and blazed angle of 13.2° and 10.5° were successfully fabricated. The peak diffraction efficiency of the gratings can reach 88% and 92% of the theoretical value respectively, which lays a foundation for the fabrication of ultraviolet transmission blazed gratings with high diffraction efficiency.